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10) China Patent No. 201080020824.5

T. Suemasu, N. Usami, "Semiconductor Device, manufacturing method therefore, and solar cell," July 9, 2014.


9) 特許第5110593号

末益崇, 宇佐美徳隆, "半導体装置およびその製造方法並びに太陽電池," May 30, 2014


8) United States Patent No. 8728854 B2

T. Suemasu, "Semiconductor material, solar cell using the semiconductor material, and methods for producing the semiconductor material and the solar cell," May 20, 2014


7) United States Patent No. 8502191 B2

T. Suemasu, N. Usami, "Semiconductor Device, manufacturing method therefore, and solar cell," Aug. 6, 2013


6) Taiwan特許第99114960号

末益崇, "半導体装置およびその製造方法並びに太陽電池," Aug. 2, 2013


5) 特許第5110593号

末益崇, "半導体材料、それを用いた太陽電池、およびそれらの製造方法," Oct. 19, 2012


4) 特許第4998923号

末益崇, "シリコンベースの高効率太陽電池およびその製造方法," May. 25, 2012


3) United States Patent No. 7999178

T.Suemasu, "Solar cell and method of producing the same," Aug. 16, 2011


2) 特許第4556959号

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1) 特許第3979115号

末益崇,長谷川文夫, 山口健志, 水嶋一樹, "鉄シリサイド層の製造方法並びに半導体基板及び光半導体装置," July 6, 2007